Abstract:
The results of design and manufacturing of the new bimagnetostriction devices which provide the objects positioning along the X Y, Z coordinate axis and the turning angle round these axis are presented. The longitudinal shift range along the X Y, Z coordinate axis is 0. ..300 urn with the positioning precision ± 0.05 urn. The angle turning range round X; Y, Z coordinate axis is 90' with the positioning precision ± I". The loading capacity is up I 0 newtons.