Electronii în microinginerie

DULGHERU, Valeriu

dc.contributor.author	DULGHERU, Valeriu
dc.date.accessioned	2020-10-02T09:46:38Z
dc.date.available	2020-10-02T09:46:38Z
dc.date.issued	2003
dc.identifier.citation	DULGHERU, Valeriu. Electronii în microinginerie. In: Fizica şi Tehnologiile Moderne. 2003, nr. 1, pp. 21-22. ISSN 1810-6498.	en_US
dc.identifier.issn	1810-6498
dc.identifier.uri	http://repository.utm.md/handle/5014/10340
dc.description.abstract	The X-ray deep litography, a polymer layer sensitive to X-rays is exposed to Xradiation from a synchrotron or electron storage ring by shading, which transfers an exact image of the abso structures on the mask into the resist. Production of miniaturized components is based on the LIGA process that is comparable with the processes used for manufacturing microprocessors.	en_US
dc.language.iso	ro	en_US
dc.publisher	Institutul de Inginerie Electronică şi Nanotehnologii "D. Ghiţu" al AŞM	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	X-rays	en_US
dc.subject	polymer layers	en_US
dc.subject	microprocessors	en_US
dc.subject	raze X	en_US
dc.subject	straturi de polimer	en_US
dc.subject	microprocesoare	en_US
dc.title	Electronii în microinginerie	en_US
dc.type	Article	en_US