Influence of TiO2 Ultra-Thin Films on Gas Sensing Properties of CuO:Zn

Abstract

Copper oxide is a p-type metal oxide with remarkable optical, electrical, thermal and sensing properties. The oxidation of Cu2O to CuO can be performed by thermal annealing at relatively low temperatures. The present study reports on the gas sensing properties of the CuO:Zn nano-crystalline films synthesized via a simple synthesis from chemical solutions (SCS) covered with a ultra-thin layer of TiO2. The TiO2 ultra-thin films were deposited via the atomic layer deposition (ALD). The gas sensing properties (selectivity, response and recovery times and gas response) were investigated in dependence of the operating temperature.