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Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL
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| dc.contributor.author | IAKOVLEV, Vladimir | |
| dc.date.accessioned | 2019-10-24T10:17:24Z | |
| dc.date.available | 2019-10-24T10:17:24Z | |
| dc.date.issued | 2011 | |
| dc.identifier.citation | IAKOVLEV, Vladimir. Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 148-153. ISBN 978-9975-66-239-0. | en_US |
| dc.identifier.isbn | 978-9975-66-239-0 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/5187 | |
| dc.description.abstract | In this paper are presented several application aspects of nano metrology tools in characterization and fabrication of high performance long wavelength wafer fused VCSELs as well as for failure analysis. As long wavelength VCSELs are emerging as attractive light-sources for replacing DFB lasers in power consumption sensitive applications, the main challenges in developing the cost and time efficient nano metrology tools for supporting processing and characterization are discussed. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | long-wavelength | en_US |
| dc.subject | vertical cavity surface-emitting lasers | en_US |
| dc.subject | VCSELs | en_US |
| dc.subject | wafer fusion | en_US |
| dc.subject | nanometrology | en_US |
| dc.title | Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL | en_US |
| dc.type | Article | en_US |
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