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Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems

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dc.contributor.author SINGH, R.
dc.contributor.author ALAPATT, G. F.
dc.contributor.author GUPTA, N.
dc.contributor.author POOLE, K. F.
dc.date.accessioned 2019-10-24T10:24:44Z
dc.date.available 2019-10-24T10:24:44Z
dc.date.issued 2011
dc.identifier.citation SINGH, R., ALAPATT, G. F., GUPTA, N. et al. Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 154-156. ISBN 978-9975-66-239-0. en_US
dc.identifier.isbn 978-9975-66-239-0
dc.identifier.uri http://repository.utm.md/handle/5014/5191
dc.description.abstract Nanostructures in dimension below about 10 nm show interesting properties because of the effect of low-dimension physics. However, to utilize these properties in practice to commercialize NEMS and related nano-systems require an extremely precise manufacturing process. This paper briefly evaluates the fundamental issues involved in manufacturing the nano-scale systems. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject NEMS en_US
dc.subject manufacturing nanoelectronics en_US
dc.subject nanoelectronics en_US
dc.subject nanosystems en_US
dc.subject nanostructures en_US
dc.title Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems en_US
dc.type Article en_US


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