dc.contributor.author | SINGH, R. | |
dc.contributor.author | ALAPATT, G. F. | |
dc.contributor.author | GUPTA, N. | |
dc.contributor.author | POOLE, K. F. | |
dc.date.accessioned | 2019-10-24T10:24:44Z | |
dc.date.available | 2019-10-24T10:24:44Z | |
dc.date.issued | 2011 | |
dc.identifier.citation | SINGH, R., ALAPATT, G. F., GUPTA, N. et al. Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 154-156. ISBN 978-9975-66-239-0. | en_US |
dc.identifier.isbn | 978-9975-66-239-0 | |
dc.identifier.uri | http://repository.utm.md/handle/5014/5191 | |
dc.description.abstract | Nanostructures in dimension below about 10 nm show interesting properties because of the effect of low-dimension physics. However, to utilize these properties in practice to commercialize NEMS and related nano-systems require an extremely precise manufacturing process. This paper briefly evaluates the fundamental issues involved in manufacturing the nano-scale systems. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Technical University of Moldova | en_US |
dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
dc.subject | NEMS | en_US |
dc.subject | manufacturing nanoelectronics | en_US |
dc.subject | nanoelectronics | en_US |
dc.subject | nanosystems | en_US |
dc.subject | nanostructures | en_US |
dc.title | Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems | en_US |
dc.type | Article | en_US |
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