Oxide engineering using metalorganic aerosol deposition

Abstract

Metalorganic aerosol deposition is shown to be one of the most promising techniques for the epitaxial growth of structurally perfect transition metal oxide films, superlattices and atomically layered oxides. The basics and the new developments of the technics are shortly descripted. Several new studies are presented to illustrate recent achievements of the technique. We demonstrate growth and properties of three different oxide systems: relatively thick thin films of optimally doped manganites - a0.67Sr0.33MnO3 nd La0.67Sr0.33MnO3; ultra-short period superlattices - (LaMnO3)n/(La0.5Ba0.5MnO3)2n, which formed films of a “digital” manganite with near optimal level of doping; and metastable layered oxides Srn+1TinO3n+1 films, which were formed via sub-unit cell control of epitaxy.