Making and Using Macroporous p-Type Silicon with Modulated Pore Diameters

Abstract

Macropores in Si have many potential uses. For some applications macropores in p-type Si with a defined diameter profile are needed. Producing these pores is more difficult than in n-type Si, where the backside illumination necessary for pore formation offers an additional degree of freedom for controlling pore properties. The paper elucidates the mechanism of pore diameter modulations in p-type Si and discusses two applications. First, the making of superior anodes for Li ion batteries; second, the production of uniform Si nanoparticles.