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Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме
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Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме
СЕНОКОСОВ, Э. А.
;
ЖДАНОВ, А. А.
;
ЧУКИТА, В. И.
URI:
http://repository.utm.md/handle/5014/8110
Date:
2018
Abstract:
A device has been developed that allows to automatically control the technological process of growing semiconductor layers and to obtain layers with controlled physical parameters.
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2018
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States
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