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Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме

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dc.contributor.author СЕНОКОСОВ, Э. А.
dc.contributor.author ЖДАНОВ, А. А.
dc.contributor.author ЧУКИТА, В. И.
dc.date.accessioned 2020-05-07T07:36:42Z
dc.date.available 2020-05-07T07:36:42Z
dc.date.issued 2018
dc.identifier.citation СЕНОКОСОВ, Э. А., ЖДАНОВ, А. А., ЧУКИТА, В. И. Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме. In: Telecomunicaţii, Electronică şi Informatică: proc. of the 6th intern. conf., May 24-27, 2018. Chişinău, 2018, pp. 501-502. ISBN 978-9975-45-540-4. en_US
dc.identifier.isbn 978-9975-45-540-4
dc.identifier.uri http://repository.utm.md/handle/5014/8110
dc.description.abstract A device has been developed that allows to automatically control the technological process of growing semiconductor layers and to obtain layers with controlled physical parameters. en_US
dc.language.iso ru en_US
dc.publisher Tehnica UTM en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject semiconductor layers en_US
dc.subject obtain layers en_US
dc.title Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме en_US
dc.type Article en_US


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