CARSTENSEN, J.; CHRISTOPHERSEN, M.; LÖLKES, S.; OSSEI-WUSU, E.; BAHR, J.; LANGA, S.; POPKIROV, G.; FÖLL, H.
(WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2005)
While electrochemical etching of small samples in the 1 cm region is relatively easy, this is not true for large areas, i.e. standard wafer sizes up to 300 mm. The paper outlines the specific demands and difficulties in ...