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Browsing by Author "KAISER, B."

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Audio-Transducer for In-Ear-Applications based on CMOS-compatible electrostatic actuators

SPITZ, B.; WALL, F.; SCHENK, H.; MELNIKOV, A.; EHRIG, L.; LANGA, S.; STOLZ, M.; KAISER, B.; CONRAD, H.; SCHENK, H. (IEEE, 2019)

Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced. In this paper, we devise methods to model such speakers in ...
Electrostactically in-plane driven silicon micropump for modular configuration

UHLIG, S.; GAUDET, M.; LANGA, S.; SCHIMMANZ, K.; CONRAD, H.; KAISER, B.; SCHENK, H. (University of Twente, 2017)

We present an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators capable of deflecting beyond the electrode gap distance. The so called ...
Electrostatic bending actuators with a liquid filled nanometer scale gap

GAUDET, M.; UHLIG, S.; STOLZ, M.; ARSCOTT, S.; CONRAD, H.; LANGA, S.; KAISER, B.; SCHENK, H. (IEEE, 2017)

We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an ...
First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition

GUARACAO, J. M. M.; KIRCHER, M.; WALL, F.; KRENKEL, M.; KAISER, B.; LANGA, S.; SCHENK, H. (IEEE, 2020)

The design, fabrication, and acoustic characterization of an electrostatic ultrasound transducer based on lateral actuation is documented in this letter. Unlike cMUTs or pMUTs, this device-NED-MUT -does not use a membrane ...
Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique

KOLKOVSKY, Vl.; STÜBNER, R.; LANGA, S.; WENDE, U.; KAISER, B.; CONRAD, H.; SCHENK, H. (ELSEVIER, 2016)

In the present study the electrical properties of 100nm and 400nm alumina films grown by the atomic layer deposition technique on p-type Si before and after a post-deposition annealing at 440°C and after a dc H plasma ...
A Novel Electrostatic Actuator Class

CONRAD, H.; KAISER, B.; GAUDET, M.; LANGA, S.; STOLZ, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H. (ELSEVIER, 2016)

Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. These actuators suffer from an operational instability, the so-called ...
Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive

LANGA, S.; CONRAD, H.; KAISER, B.; STOLZ, M.; GAUDET, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H. (Springer Nature Switzerland, 2003)

This paper presents the technological aspects of a newly demonstrated actuation principle, the so-called nano-e-drive. Using this principle, cantilevers can be moved in or out of chip plane. In this paper, only the ...

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