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Micro-oxidation of silicon surfaces by means of electrical discharges in impulse
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| dc.contributor.author | TOPALA, P. | |
| dc.contributor.author | MELNIC, V. | |
| dc.contributor.author | GUZGAN, D. | |
| dc.date.accessioned | 2020-09-30T14:41:34Z | |
| dc.date.available | 2020-09-30T14:41:34Z | |
| dc.date.issued | 2013 | |
| dc.identifier.citation | TOPALA, P., MELNIC, V., GUZGAN, D. Micro-oxidation of silicon surfaces by means of electrical discharges in impulse. In: Fizică şi tehnică: procese, modele, experimente. 2013, nr. 2, pp. 32-36. ISSN 1857-0437. | en_US |
| dc.identifier.issn | 1857-0437 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/10228 | |
| dc.description.abstract | The paper presents the results of the theoretical and experimental study of the formation of oxide films on silicon surfaces by means of rapid thermal oxidation in plasma caused by electrical discharges in impulse. The oxidation process has been carried out under normal atmospheric conditions. It has been shown that the properties of the oxide films depend on the processing power as well as the electrode base materials. | en_US |
| dc.description.abstract | Articolul prezintă rezultatele studiul teoretico-experimental privind formarea peliculelor de oxizi pe suprafeţele din siliciu cu ajutorul oxidării termice rapide în plasma cauzată de descărcările electrice în impuls. Procesul de oxidare a fost obţinut în atmosferă în condiţii normale. Se arată că proprietăţile peliculelor de oxizi depind de puterea disipată pe suprafaţa prelucrată, precum şi de materialul de bază a electrozilor. | |
| dc.language.iso | en | en_US |
| dc.publisher | Universitatea de Stat „Alecu Russo“ din Bălţi | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | pelicule de oxizi | en_US |
| dc.subject | oxidarea suprafeţelor | en_US |
| dc.subject | oxidation of silicon surfaces | en_US |
| dc.subject | oxide films | en_US |
| dc.title | Micro-oxidation of silicon surfaces by means of electrical discharges in impulse | en_US |
| dc.type | Article | en_US |
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