Synthesis of MgxZn1-xO thin films by spin coating and aerosol deposition methods

Abstract

Ternary oxide solutions MgxZn1-xO with wide band gap are of great interest due to their potential applications in shot-wavelength optoelectronic devices based on MgZnO/ZnO heterojunctions. In this report we present results of morphology investigation by means atomic force microscopy (AFM) and scanning electron microscopy (SEM) as well as of optical analysis by means of absorption spectroscopy in MgxZn1 -xO thin films as a function of Mg concentration. MgxZn1-xO thin films were deposited by sol-gel spin coating and aerosol deposition methods on Si (100) and silica glass substrates.