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Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films

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dc.contributor.author HAREA, E. E.
dc.contributor.author AIFANTIS, K. E.
dc.contributor.author PYRTSAC, K. M.
dc.contributor.author GHIMPU, L.
dc.date.accessioned 2021-11-03T10:12:25Z
dc.date.available 2021-11-03T10:12:25Z
dc.date.issued 2015
dc.identifier.citation HAREA, E. E., AIFANTIS, K. E., PYRTSAC, K. M. Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films. In: Nanoscience Advances in CBRN Agents Detection, Information and Energy Security. NATO Science for Peace and Security Series A: Chemistry and Biology. 2015, pp. 53-59. ISBN 978-94-017-9697-2. en_US
dc.identifier.isbn 978-94-017-9697-2
dc.identifier.uri https://doi.org/10.1007/978-94-017-9697-2_5
dc.identifier.uri http://repository.utm.md/handle/5014/17870
dc.description Access full text: https://doi.org/10.1007/978-94-017-9697-2_5 en_US
dc.description.abstract The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to −3.7. en_US
dc.language.iso en en_US
dc.publisher Springer Nature Switzerland en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject indium tin oxide en_US
dc.subject thin films en_US
dc.subject nanoindentations en_US
dc.subject sensors en_US
dc.title Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films en_US
dc.type Article en_US


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