Hardness of the Cu thin films grown on the MgO substrate

GRABCO, D.; PYRTSAC, C.; GHIMPU, L.

dc.contributor.author	GRABCO, D.
dc.contributor.author	PYRTSAC, C.
dc.contributor.author	GHIMPU, L.
dc.date.accessioned	2021-11-03T12:43:30Z
dc.date.available	2021-11-03T12:43:30Z
dc.date.issued	2014
dc.identifier.citation	GRABCO, D., PYRTSAC, C., GHIMPU, L. Hardness of the Cu thin films grown on the MgO substrate. In: Materials Science and Condensed Matter Physics: proc., Ed. 7, 16-19 septembrie 2014, Chişinău, Moldova, 2014, pp. 156.	en_US
dc.identifier.uri	http://repository.utm.md/handle/5014/17876
dc.description.abstract	In this paper we studied the mechanical propeties of Cu thin films grown on MgO ( 4) substrate. The Cu films were obtained by the method of magnetron sputtering (with Magnetron Sputtering RF) at room temperature with thickness t=85 (I), 470 (2), 1000 (3) nm. The roughness, Ra, of the surface of thin films was estimated using the atomic force microscope and optical microscopes.	en_US
dc.language.iso	en	en_US
dc.publisher	Institutul de Fizică Aplicată al AŞM	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	films	en_US
dc.subject	thin films	en_US
dc.title	Hardness of the Cu thin films grown on the MgO substrate	en_US
dc.type	Article	en_US