COLIBABA, G. V.; RUSNAC, D.; FEDOROV, V.; COSTRIUCOVA, N.; MONAICO, E. V.; POTLOG, T.
(Springer, Cham, 2022)
Sintering of ZnO + Me2O3 (Me = Al, Ga, In) powder via chemical vapor transport based on HCl has been developed. The electrical properties of ZnO thin films obtained by DC magnetron sputtering of ZnO ceramic targets have ...