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Highly Conductive ZnO Thin Films Deposited Using CVT Ceramics as Magnetron Targets

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dc.contributor.author COLIBABA, G. V.
dc.contributor.author RUSNAC, D.
dc.contributor.author FEDOROV, V.
dc.contributor.author COSTRIUCOVA, N.
dc.contributor.author MONAICO, E. V.
dc.contributor.author POTLOG, T.
dc.date.accessioned 2022-02-04T08:21:50Z
dc.date.available 2022-02-04T08:21:50Z
dc.date.issued 2022
dc.identifier.citation COLIBABA, G. V., RUSNAC, D., FEDOROV, V. et al. Highly Conductive ZnO Thin Films Deposited Using CVT Ceramics as Magnetron Targets. In: 5th International Conference on Nanotechnologies and Biomedical Engineering, ICNBME: proc. IFMBE, 3-5 Nov. 2021, Chișinău, Moldova, 2022, V. 87, pp. 110-116. ISBN 978-3-030-92328-0. en_US
dc.identifier.isbn 978-3-030-92328-0
dc.identifier.uri https://doi.org/10.1007/978-3-030-92328-0_15
dc.identifier.uri http://repository.utm.md/handle/5014/19158
dc.description Acces full text - https://doi.org/10.1007/978-3-030-92328-0_15 en_US
dc.description.abstract Sintering of ZnO + Me2O3 (Me = Al, Ga, In) powder via chemical vapor transport based on HCl has been developed. The electrical properties of ZnO thin films obtained by DC magnetron sputtering of ZnO ceramic targets have been studied. Transparency, morphology, crystallinity and crystallite size of thin films have also been investigated. ZnO:Ga thin films with a resistivity of 2.5 × 10–4 Ω⋅cm have been successfully obtained. The films doped with Al have lower conductivity due to weak sputtering of insoluble Al2O3 dielectric inclusions in ceramics. In the case of sintering of ZnO together with In2O3, a significant loss of the doping material is observed. en_US
dc.language.iso en en_US
dc.publisher Springer, Cham en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject thin films en_US
dc.subject films en_US
dc.subject magnetron sputtering en_US
dc.subject ceramic targets en_US
dc.subject doping materials en_US
dc.title Highly Conductive ZnO Thin Films Deposited Using CVT Ceramics as Magnetron Targets en_US
dc.type Article en_US


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