dc.contributor.author | CIOBANU, Vladimir | |
dc.contributor.author | CECCONE, Giacomo | |
dc.contributor.author | JIN, Irina | |
dc.contributor.author | BRANISTE, Tudor | |
dc.contributor.author | YE, Fei | |
dc.contributor.author | FUMAGALLI, Francesco | |
dc.contributor.author | COLPO, Pascal | |
dc.contributor.author | DUTTA, Joydeep | |
dc.contributor.author | LINNROS, Jan | |
dc.contributor.author | TIGINYANU, Ion | |
dc.date.accessioned | 2022-03-07T11:39:24Z | |
dc.date.available | 2022-03-07T11:39:24Z | |
dc.date.issued | 2022 | |
dc.identifier.citation | CIOBANU, Vladimir, CECCONE, Giacomo, JIN, Irina. Large-Sized Nanocrystalline Ultrathin β-Ga2O3 Membranes Fabricated by Surface Charge Lithography. In: Nanomaterials, 2022, V. 12, N. 4, Art. N. 689. ISSN 2079-4991. | en_US |
dc.identifier.issn | 2079-4991 | |
dc.identifier.uri | https://doi.org/10.3390/nano12040689 | |
dc.identifier.uri | http://repository.utm.md/handle/5014/19526 | |
dc.description.abstract | Large-sized 2D semiconductor materials have gained significant attention for their fascinating properties in various applications. In this work, we demonstrate the fabrication of nanoperforated ultrathin β-Ga2O3 membranes of a nanoscale thickness. The technological route includes the fabrication of GaN membranes using the Surface Charge Lithography (SCL) approach and subsequent thermal treatment in air at 900 0 C in order to obtain β-Ga2O3 membranes. The as-grown GaN membranes were discovered to be completely transformed into β -Ga2O3, with the morphology evolving from a smooth topography to a nanoperforated surface consisting of nanograin structures. The oxidation mechanism of the membrane was investigated under different annealing conditions followed by XPS, AFM, Raman and TEM analyses. | en_US |
dc.language.iso | en | en_US |
dc.publisher | MDPI (Basel, Switzerland) | en_US |
dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
dc.subject | semiconductor materials | en_US |
dc.subject | nanoperforated ultrathin membranes | en_US |
dc.subject | ultrathin membranes | en_US |
dc.subject | membranes | en_US |
dc.subject | surface charge lithography | en_US |
dc.title | Large-Sized Nanocrystalline Ultrathin β-Ga2O3 Membranes Fabricated by Surface Charge Lithography | en_US |
dc.type | Article | en_US |
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