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Large-Sized Nanocrystalline Ultrathin β-Ga2O3 Membranes Fabricated by Surface Charge Lithography

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dc.contributor.author CIOBANU, Vladimir
dc.contributor.author CECCONE, Giacomo
dc.contributor.author JIN, Irina
dc.contributor.author BRANISTE, Tudor
dc.contributor.author YE, Fei
dc.contributor.author FUMAGALLI, Francesco
dc.contributor.author COLPO, Pascal
dc.contributor.author DUTTA, Joydeep
dc.contributor.author LINNROS, Jan
dc.contributor.author TIGINYANU, Ion
dc.date.accessioned 2022-03-07T11:39:24Z
dc.date.available 2022-03-07T11:39:24Z
dc.date.issued 2022
dc.identifier.citation CIOBANU, Vladimir, CECCONE, Giacomo, JIN, Irina. Large-Sized Nanocrystalline Ultrathin β-Ga2O3 Membranes Fabricated by Surface Charge Lithography. In: Nanomaterials, 2022, V. 12, N. 4, Art. N. 689. ISSN 2079-4991. en_US
dc.identifier.issn 2079-4991
dc.identifier.uri https://doi.org/10.3390/nano12040689
dc.identifier.uri http://repository.utm.md/handle/5014/19526
dc.description.abstract Large-sized 2D semiconductor materials have gained significant attention for their fascinating properties in various applications. In this work, we demonstrate the fabrication of nanoperforated ultrathin β-Ga2O3 membranes of a nanoscale thickness. The technological route includes the fabrication of GaN membranes using the Surface Charge Lithography (SCL) approach and subsequent thermal treatment in air at 900 0 C in order to obtain β-Ga2O3 membranes. The as-grown GaN membranes were discovered to be completely transformed into β -Ga2O3, with the morphology evolving from a smooth topography to a nanoperforated surface consisting of nanograin structures. The oxidation mechanism of the membrane was investigated under different annealing conditions followed by XPS, AFM, Raman and TEM analyses. en_US
dc.language.iso en en_US
dc.publisher MDPI (Basel, Switzerland) en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject semiconductor materials en_US
dc.subject nanoperforated ultrathin membranes en_US
dc.subject ultrathin membranes en_US
dc.subject membranes en_US
dc.subject surface charge lithography en_US
dc.title Large-Sized Nanocrystalline Ultrathin β-Ga2O3 Membranes Fabricated by Surface Charge Lithography en_US
dc.type Article en_US


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