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Nanoindentation of ZnSnO/Si thin films prepared by aerosol spray pyrolysis

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dc.contributor.author MORARI, V.
dc.contributor.author PYRTSAC, C.
dc.contributor.author CURMEI, N.
dc.contributor.author GRABCO, D.
dc.contributor.author RUSU, E. V.
dc.contributor.author URSACHI, V. V.
dc.contributor.author TIGINYANU, I. M.
dc.date.accessioned 2022-04-11T10:19:09Z
dc.date.available 2022-04-11T10:19:09Z
dc.date.issued 2021
dc.identifier.citation MORARI, V., PYRTSAC, C., CURMEI, N. et al. Nanoindentation of ZnSnO/Si thin films prepared by aerosol spray pyrolysis. In: Romanian Journal of Physics, 2021, V. 66, N. 3-4, Art. N. I603. SSN 1221-146X. en_US
dc.identifier.issn 1221-146X.
dc.identifier.uri http://repository.utm.md/handle/5014/20055
dc.description.abstract Thin ZnSnO films with different thickness deposited on Si substrates by aerosol spray pyrolysis were investigated by scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), X-ray diffraction (XRD), atomic force microscopy (AFM) and light microscopy (LM) using depth-sensitive nanoindentation with Berkovich indenter. The values of the Young modulus (E), nanohardness (H), and plasticity index (H/E) of the prepared films were determined according to the Oliver-Pharr method in the diapason of the applied loads of 30–300 mN. The main factors contributing to the nanomechanical properties of film-substrate structures were identified, and the deformation mechanisms of the ZnSnO/Si coated system (CS) under nanoindentation have been revealed. en_US
dc.language.iso en en_US
dc.publisher Publishing House of the Romanian Academy en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject thin films en_US
dc.subject films en_US
dc.subject silicium substrates en_US
dc.subject substrates en_US
dc.subject pyrolysis en_US
dc.subject nanoindentation en_US
dc.subject deformations en_US
dc.title Nanoindentation of ZnSnO/Si thin films prepared by aerosol spray pyrolysis en_US
dc.type Article en_US


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