Nanoindentation of ZnSnO/Si thin films prepared by aerosol spray pyrolysis

Abstract

Thin ZnSnO films with different thickness deposited on Si substrates by aerosol spray pyrolysis were investigated by scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), X-ray diffraction (XRD), atomic force microscopy (AFM) and light microscopy (LM) using depth-sensitive nanoindentation with Berkovich indenter. The values of the Young modulus (E), nanohardness (H), and plasticity index (H/E) of the prepared films were determined according to the Oliver-Pharr method in the diapason of the applied loads of 30–300 mN. The main factors contributing to the nanomechanical properties of film-substrate structures were identified, and the deformation mechanisms of the ZnSnO/Si coated system (CS) under nanoindentation have been revealed.