VOLCIUC, Olesea; BRANISTE, Tudor; TIGINYANU, Ion; STEVENS-KALCEFF, Marion A.; EBELING, Jakob; ASCHENBRENNER, Timo; HOMMEL, Detlef; URSAKI, Veaceslav; GUTOWSKI, Jürgen
(AIP Publishing LLC, 2013)
We report on fabrication of suspended ~15 nm thick GaN membranes nanoperforated in an ordered fashion using direct writing of negative charges by focused ion beam and subsequent photoelectrochemical etching of GaN epilayers. ...