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Process for independent pore networks obtaining in semiconductor wafers

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dc.contributor.author MONAICO, Eduard
dc.contributor.author URSAKI, Veaceslav
dc.contributor.author TIGINYANU, Ion
dc.date.accessioned 2022-05-20T10:39:41Z
dc.date.available 2022-05-20T10:39:41Z
dc.date.issued 2022
dc.identifier.citation MONAICO, Eduard, URSAKI, Veaceslav, TIGINYANU, Ion. Process for independent pore networks obtaining in semiconductor wafers. In: European Exhibition of Creativity and Innovation: proc. of the 14th ed. EUROINVENT, Iasi, Romania: hybrid ed., 2022, pp. 150-151. ISSN 2601-4564. e-ISSN 2601-4572. en_US
dc.identifier.issn 2601-4564
dc.identifier.issn 2601-4572
dc.identifier.uri http://repository.utm.md/handle/5014/20335
dc.description Istitution: Technical University of Moldova. Patent application No. a 2022 0001 from 24.01.2022. Exibits Clasification: Class no. 14. - Other. en_US
dc.description.abstract The invention relates to the technology for the production of nanostructured materials, in particular to processes for obtaining of semiconductor nanostructures by electrochemical etching, which can be used in microfluidics and micro-electro-mechanical systems (MEMS). en_US
dc.language en
dc.publisher Romanian Inventors Forum en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject invenţii en_US
dc.subject inventions en_US
dc.subject nanostructured materials en_US
dc.subject semiconductor nanostructures en_US
dc.subject electrochemical etching en_US
dc.subject Micro-Electro-Mechanical Systems en_US
dc.subject microfluidics en_US
dc.title Process for independent pore networks obtaining in semiconductor wafers en_US
dc.type Article en_US


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  • 2022
    Proceedings of the 14th Edition of European Exhibition of Creativity and Innovation, Romania

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Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

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