AVOTINA, Liga; DEKHTYAR, Yuri; ROMANOVA, Marina; SHULZINGER, Evgeny; SCHMIDT, Ben; VILKEN, Aleksandr; ZASLAVSKI, Aleksandr; ENICHEK, Gennady
(Tehnica UTM, 2018)
The silicon nitride nanomultilayer structure (5 layers, thickness of each around 12 nm) was fabricated in one reactor. The structure had less oxygen concentration against the monolayer one having the same thickness. The ...