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Combination Thermostated Vacuum Gauge

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dc.contributor.author BELOTERCOVSCHII, Igori
dc.contributor.author SIDORENKO, Anatolie
dc.contributor.author CONDREA, Elena
dc.contributor.author SMYSLOV, Vladimir
dc.date.accessioned 2023-11-10T09:49:06Z
dc.date.available 2023-11-10T09:49:06Z
dc.date.issued 2023
dc.identifier.citation BELOTERCOVSCHII, Igori, SIDORENKO, Anatolie, CONDREA, Elena et al. Combination Thermostated Vacuum Gauge. In: 6th International Conference on Nanotechnologies and Biomedical Engineering: proc. of ICNBME-2023, 20–23, 2023, Chisinau, vol. 1: Nanotechnologies and Nano-biomaterials for Applications in Medicine, 2023, p. 574-581. ISBN 978-3-031-42774-9. e-ISBN 978-3-031-42775-6. en_US
dc.identifier.isbn 978-3-031-42774-9
dc.identifier.isbn 978-3-031-42775-6
dc.identifier.uri https://doi.org/10.1007/978-3-031-42775-6_61
dc.identifier.uri http://repository.utm.md/handle/5014/24754
dc.description Acces full text - https://doi.org/10.1007/978-3-031-42775-6_61 en_US
dc.description.abstract To expand the measured pressure range, a prototype of a CVG-3 combination vacuum gauge using different physical principles of pressure measurement has been developed and constructed; it includes an electronic controller and a specially designed TTD-2 deformation–thermoelectric combination transducer. The transducer includes thermoelectric and deformation sensors. The sensitive element of the thermoelectric sensor consists of an electrically insulating film with heating and measuring circuits formed on the film surface by vacuum deposition; the measuring circuit is an array of thermocouples. The use of a thin insulating film in constructing the sensitive element has made it possible to significantly expand the measured pressure range toward high vacuum. The sensitive element of the deformation sensor is a silicon chip with a thin membrane in the middle; a tensoresistive bridge is formed on the membrane surface. The decrease in the membrane thickness has made it possible to increase the sensitivity of the sensor at pressures below 1 Torr. To decrease the pressure measurement error depending on changes in ambient temperature, the sensors are thermostated. Each sensor has an individual thermostat. The use of the thermocouple and tensometric principles of pressure measurement has made it possible to expand the measured pressure range from deep vacuum to atmospheric pressure, while maintaining high measurement accuracy. The large overlap of the measurement ranges of the sensors has made it possible to exclude jumps in the vacuum gauge readings upon switching from one physical principle of pressure measurement to another. en_US
dc.language.iso en en_US
dc.publisher Springer Nature Switzerland en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject vacuum gauge en_US
dc.subject pressure measurement en_US
dc.subject thermocouple en_US
dc.subject tensometric principles en_US
dc.title Combination Thermostated Vacuum Gauge en_US
dc.type Article en_US


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  • 2023
    6th International Conference on Nanotechnologies and Biomedical Engineering, September 20–23, 2023, Chisinau, Moldova

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Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

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