Thermostated vacuum gauge

Abstract

To improve the accuracy of measurements in the low pressure region, a prototype of the TVG-2 thermoelectric vacuum gauge has been designed and constructed; it includes an electronic unit and a TTC-5 thermocouple transducer, the sensitive element of which is a thin electrically insulating film; heating and measuring circuits are deposited on the surface of the film by vacuum deposition methods; the measuring circuit has the form of a thermocouple array.