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Gas and Pressure Sensors

Gas and Pressure Sensors

GHIMPU, Lidia
URI: http://repository.utm.md/handle/5014/26391
Date: 2020

Abstract:

This invention relates to the manufacture of gas and pressure sensors based on thin oxide layers. The oxide thin layers were obtained by the RF magnetron sputtering method. Carbon substrates and fiber optics were used in the manufacture of these sensors.

Description:

Class no. 1 – Environment. Pollution Control

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  • 2020
    Proceedings of the 12 th Edition of European Exhibition of Creativity and Innovation, Romania
Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

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