Using of the MEAM model for adjusting the technological parameters of magnetron deposition of Nb/Co nanolayers

Abstract

Superconductivity and ferromagnetism being two antagonistic orders, we can meet them only in artificial formations, usually in the form of nanolayers deposited by certain technological methods. A common and highly effective method is the deposition of nanolayers by the magnetron method. Deposition by the magnetron sputtering method proposes nanofilms of well- controlled thicknesses, deposition in a single vacuum cycle and reproduction of layered structures with high precision.