Study of Ga2O3 thin films obtained by aerosol spray pirolysis

Abstract

Gallium oxide thin films have been grown by various techniques such as chemical vapor deposition (CVD), vacuum thermal evaporation, atomic layer deposition (ALD), but less from chemical solutions. In this research, we have developed the spray pyrolysis technology which is a pretty cheap, low-cost and simple technology, ideal for optoelectronic applications and allows us to obtain thin films of different thicknesses controlling the temperature and speed of deposition.