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Study of Ga2O3 thin films obtained by aerosol spray pirolysis

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dc.contributor.author MORARI, Vadim
dc.contributor.author RUSU, Emil
dc.contributor.author ZALAMAI, Victor
dc.contributor.author MESHALKIN, Alexei
dc.date.accessioned 2024-04-25T10:19:18Z
dc.date.available 2024-04-25T10:19:18Z
dc.date.issued 2024
dc.identifier.citation MORARI, Vadim et al. Study of Ga2O3 thin films obtained by aerosol spray pirolysis. In: Quo Vadis – Ethics of the Scientific Research: conf. NANO-2024, event devoted to the 60th anniversary of the Technical University of Moldova, 15-18 April 2024, Chişinău, Republica Moldova: Program and proceedings of the conference, Chişinău 2024, pp. 71-72. ISBN 978-9975-64-422-8. en_US
dc.identifier.isbn 978-9975-64-422-8
dc.identifier.uri http://repository.utm.md/handle/5014/26914
dc.description.abstract Gallium oxide thin films have been grown by various techniques such as chemical vapor deposition (CVD), vacuum thermal evaporation, atomic layer deposition (ALD), but less from chemical solutions. In this research, we have developed the spray pyrolysis technology which is a pretty cheap, low-cost and simple technology, ideal for optoelectronic applications and allows us to obtain thin films of different thicknesses controlling the temperature and speed of deposition. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.relation.ispartofseries NANO-2024 "Quo Vadis – Ethics of the Scientific Research", event devoted to the 60th anniversary of the Technical University of Moldova;15-18 April 2024, Chişinău, Republica Moldova
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject gallium oxide thin films en_US
dc.subject spray pyrolysis technology en_US
dc.subject thin films en_US
dc.title Study of Ga2O3 thin films obtained by aerosol spray pirolysis en_US
dc.type Article en_US


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