DSpace Repository
Porous vs. Magnetron RF Sputtering Of InP for Portable THz-TDS in Pharmaceutical and Medical Applications
JavaScript is disabled for your browser. Some features of this site may not work without it.
| dc.contributor.author | SIRBU, L. | |
| dc.contributor.author | DANILA, M. | |
| dc.contributor.author | MULLER, R. | |
| dc.contributor.author | GHIMPU, L. | |
| dc.contributor.author | DOBLETBAEV, R. | |
| dc.contributor.author | DASCALU, T. | |
| dc.contributor.author | GRIGORE (SANDU), O. | |
| dc.contributor.author | SARUA, A. | |
| dc.contributor.author | URSAKI, V. | |
| dc.date.accessioned | 2019-10-04T10:48:07Z | |
| dc.date.available | 2019-10-04T10:48:07Z | |
| dc.date.issued | 2013 | |
| dc.identifier.citation | SIRBU, L., DANILA, M., MULLER, R. et al. Porous vs. Magnetron RF Sputtering Of InP for Portable THz-TDS in Pharmaceutical and Medical Applications. In: ICNBME-2013. International Conference on Nanotechnologies and Biomedical Engineering. German-Moldovan Workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the 2th intern. conf., April 18-20, 2013. Chişinău, 2013, pp. 161-162. ISBN 978-9975-62-343-8. | en_US |
| dc.identifier.isbn | 978-9975-62-343-8 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/4618 | |
| dc.description.abstract | We developed a combination of technology for deposition contacts/wires upon nanoporous InP thin film structures and RF sputtering InP films. Indium phosphide (InP) films were deposited onto glass substrate using RF magnetron sputtering by varying the substrate temperature (50–100oC), under constant argon pressure (6.3•10-3Bar) and RF power (100 W). | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | InP films | en_US |
| dc.subject | RF sputterings | en_US |
| dc.subject | porous InP | en_US |
| dc.subject | THz antenna | en_US |
| dc.subject | pelicule subțiri | en_US |
| dc.title | Porous vs. Magnetron RF Sputtering Of InP for Portable THz-TDS in Pharmaceutical and Medical Applications | en_US |
| dc.type | Article | en_US |
Files in this item
The following license files are associated with this item:
This item appears in the following Collection(s)
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States