Abstract:
Diamond-like carbon films (DLC films) for cardiovascular implants have successfully been prepared by dual-target unbalanced magnetron sputtering and Rapid Photothermal Processing (RPP). It is found that the sputtering current of target plays an important role in the DLC film deposition. Deposition rate of 3.5 μm/h is obtained by using the sputtering current of 30 A. Rapid Photothermal Processing at 400C essentially reduced the carbon content and have improved the surface morphology structure of deposited coatings, which depend on the intensity of the ion impingement on the growing interface.