dc.contributor.author | ARMENCEA, Nicolae | |
dc.date.accessioned | 2019-10-17T09:23:31Z | |
dc.date.available | 2019-10-17T09:23:31Z | |
dc.date.issued | 2005 | |
dc.identifier.citation | ARMENCEA, Nicolae. Evolution of scanning and of the probe microscope checking methods of the electronic products. In: Microelectronics and Computer Science: proc. of the 4th intern. conf., September 15-17, 2005. Chişinău, 2005, vol. 1, pp. 216-218. ISBN 9975-66-038-X. | en_US |
dc.identifier.isbn | 9975-66-038-X | |
dc.identifier.uri | http://repository.utm.md/handle/5014/4775 | |
dc.description.abstract | It is organized comparative analysis of possibilities, merits and demerits of the laser scanning and electronic microscopic methods of checking the electronic products. There are considered the principles of operation of the tunnel scanning and atom force microscopes, which spatial resolutions reaches the pica- meters. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Technical University of Moldova | en_US |
dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
dc.subject | laser microscopes | en_US |
dc.subject | electronic microscopes | en_US |
dc.subject | atom force scanning microscopes | en_US |
dc.subject | microscopes | en_US |
dc.subject | scanning | en_US |
dc.subject | electronic products | en_US |
dc.title | Evolution of scanning and of the probe microscope checking methods of the electronic products | en_US |
dc.type | Article | en_US |
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