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Evolution of scanning and of the probe microscope checking methods of the electronic products

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dc.contributor.author ARMENCEA, Nicolae
dc.date.accessioned 2019-10-17T09:23:31Z
dc.date.available 2019-10-17T09:23:31Z
dc.date.issued 2005
dc.identifier.citation ARMENCEA, Nicolae. Evolution of scanning and of the probe microscope checking methods of the electronic products. In: Microelectronics and Computer Science: proc. of the 4th intern. conf., September 15-17, 2005. Chişinău, 2005, vol. 1, pp. 216-218. ISBN 9975-66-038-X. en_US
dc.identifier.isbn 9975-66-038-X
dc.identifier.uri http://repository.utm.md/handle/5014/4775
dc.description.abstract It is organized comparative analysis of possibilities, merits and demerits of the laser scanning and electronic microscopic methods of checking the electronic products. There are considered the principles of operation of the tunnel scanning and atom force microscopes, which spatial resolutions reaches the pica- meters. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject laser microscopes en_US
dc.subject electronic microscopes en_US
dc.subject atom force scanning microscopes en_US
dc.subject microscopes en_US
dc.subject scanning en_US
dc.subject electronic products en_US
dc.title Evolution of scanning and of the probe microscope checking methods of the electronic products en_US
dc.type Article en_US


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