JavaScript is disabled for your browser. Some features of this site may not work without it.
| dc.contributor.author | SIRBU, Lilian | |
| dc.contributor.author | MULLER, Raluca | |
| dc.contributor.author | DANILA, Mihai | |
| dc.contributor.author | SCHIOPU, Vasilica | |
| dc.contributor.author | MATEI, Alina | |
| dc.contributor.author | COMANESCU, Florin | |
| dc.contributor.author | STEFAN, Angela | |
| dc.contributor.author | BARACU, Angela | |
| dc.contributor.author | DASCALU, Traian | |
| dc.date.accessioned | 2019-10-21T13:14:39Z | |
| dc.date.available | 2019-10-21T13:14:39Z | |
| dc.date.issued | 2014 | |
| dc.identifier.citation | SIRBU, Lilian, MULLER, Raluca, DANILA, Mihai, SCHIOPU, Vasilica, MATEI, Alina, COMANESCU, Florin, STEFAN, Angela, BARACU, Angela, DASCALU, Traian. Materials for Integrated of THz sensors in EWOD chips. In: Microelectronics and Computer Science: proc. of the 8th intern. conf., October 22-25, 2014. Chişinău, 2014, pp. 102-105. ISBN 978-9975-45-329-5. | en_US |
| dc.identifier.isbn | 978-9975-45-329-5 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/4951 | |
| dc.description.abstract | We developed a technology for deposition of metal contacts/wires upon nanoporous InP thin film structures and RF sputtered InP films. Indium phosphide (InP) films were deposited onto glass substrate using RF magnetron sputtering by varying the substrate temperature (50–100oC), under constant argon pressure (6.3•10-3 Bar) and RF power (40-100 W). | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Tehnica UTM | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | InP film | en_US |
| dc.subject | LT-InP | en_US |
| dc.subject | terahertz (THz) spectroscopy | en_US |
| dc.subject | THz-TDS | en_US |
| dc.title | Materials for Integrated of THz sensors in EWOD chips | en_US |
| dc.type | Article | en_US |
Files in this item
The following license files are associated with this item:
This item appears in the following Collection(s)
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States