DSpace Repository

Materials for Integrated of THz sensors in EWOD chips

Show simple item record

dc.contributor.author SIRBU, Lilian
dc.contributor.author MULLER, Raluca
dc.contributor.author DANILA, Mihai
dc.contributor.author SCHIOPU, Vasilica
dc.contributor.author MATEI, Alina
dc.contributor.author COMANESCU, Florin
dc.contributor.author STEFAN, Angela
dc.contributor.author BARACU, Angela
dc.contributor.author DASCALU, Traian
dc.date.accessioned 2019-10-21T13:14:39Z
dc.date.available 2019-10-21T13:14:39Z
dc.date.issued 2014
dc.identifier.citation SIRBU, Lilian, MULLER, Raluca, DANILA, Mihai, SCHIOPU, Vasilica, MATEI, Alina, COMANESCU, Florin, STEFAN, Angela, BARACU, Angela, DASCALU, Traian. Materials for Integrated of THz sensors in EWOD chips. In: Microelectronics and Computer Science: proc. of the 8th intern. conf., October 22-25, 2014. Chişinău, 2014, pp. 102-105. ISBN 978-9975-45-329-5. en_US
dc.identifier.isbn 978-9975-45-329-5
dc.identifier.uri http://repository.utm.md/handle/5014/4951
dc.description.abstract We developed a technology for deposition of metal contacts/wires upon nanoporous InP thin film structures and RF sputtered InP films. Indium phosphide (InP) films were deposited onto glass substrate using RF magnetron sputtering by varying the substrate temperature (50–100oC), under constant argon pressure (6.3•10-3 Bar) and RF power (40-100 W). en_US
dc.language.iso en en_US
dc.publisher Tehnica UTM en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject InP film en_US
dc.subject LT-InP en_US
dc.subject terahertz (THz) spectroscopy en_US
dc.subject THz-TDS en_US
dc.title Materials for Integrated of THz sensors in EWOD chips en_US
dc.type Article en_US


Files in this item

The following license files are associated with this item:

This item appears in the following Collection(s)

Show simple item record

Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

Search DSpace


Advanced Search

Browse

My Account