Porous InP as Piezoelectric Matrix Materialin 1-3 Magnetoelectric Composite Sensors

Abstract

This work shows the results of the fabrication of semi-insulating piezoelectric porous InP structures by electrochemical etching and subsequent purely chemical post–etching in an isotropic HF, HNO3, EtOH and HAc containing electrolyte. The piezoelectric modulus d14 of porous InP is measured to around |60| pm / V, which larger by a factor of 30 compared to bulk InP.