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Morphology and Luminescence Properties of ZnO layers produced by Magnetron Spattering

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dc.contributor.author RUSU, Emil
dc.contributor.author GHIŢU, Irina
dc.contributor.author PRILEPOV, Vladimir
dc.contributor.author ZALAMAI, Victor
dc.contributor.author URSAKI, Veaceslav
dc.date.accessioned 2019-10-23T11:11:12Z
dc.date.available 2019-10-23T11:11:12Z
dc.date.issued 2011
dc.identifier.citation RUSU, Emil, GHIŢU, Irina, PRILEPOV, Vladimir et al. Morphology and Luminescence Properties of ZnO layers produced by Magnetron Spattering. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 128-132. ISBN 978-9975-66-239-0. en_US
dc.identifier.isbn 978-9975-66-239-0
dc.identifier.uri http://repository.utm.md/handle/5014/5108
dc.description.abstract We show that the morphology and the luminescence properties of ZnO layers produced by magnetron sputtering can be controlled by technological parameters of sputtering, particularly by the ratio of argon to oxygen gases in the gas flow during the growth process. Smooth and flat layers were produced with a high Ar/O ratio, while porous layers with various morphologies were obtained with a low Ar/O ratio. The layers produced with O/Ar ration equal to 10 exhibit extremely high near-bandgap luminescence intensity even higher in comparison with bulk ZnO single crystals. The free carrier density estimated from the analysis of photoluminescence spectra is also very high in these samples suggesting that these technological conditions promote both optical and electrical activation of the doping Al impurity. The samples grown with high Ar/O ratios exhibit strong visible emission which is controlled by the technological conditions. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject ZnO layers en_US
dc.subject magnetron sputtering en_US
dc.subject luminescence en_US
dc.subject excitonic emissions en_US
dc.subject deep centers en_US
dc.title Morphology and Luminescence Properties of ZnO layers produced by Magnetron Spattering en_US
dc.type Article en_US


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