Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL

Abstract

In this paper are presented several application aspects of nano metrology tools in characterization and fabrication of high performance long wavelength wafer fused VCSELs as well as for failure analysis. As long wavelength VCSELs are emerging as attractive light-sources for replacing DFB lasers in power consumption sensitive applications, the main challenges in developing the cost and time efficient nano metrology tools for supporting processing and characterization are discussed.