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Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL

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dc.contributor.author IAKOVLEV, Vladimir
dc.date.accessioned 2019-10-24T10:17:24Z
dc.date.available 2019-10-24T10:17:24Z
dc.date.issued 2011
dc.identifier.citation IAKOVLEV, Vladimir. Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 148-153. ISBN 978-9975-66-239-0. en_US
dc.identifier.isbn 978-9975-66-239-0
dc.identifier.uri http://repository.utm.md/handle/5014/5187
dc.description.abstract In this paper are presented several application aspects of nano metrology tools in characterization and fabrication of high performance long wavelength wafer fused VCSELs as well as for failure analysis. As long wavelength VCSELs are emerging as attractive light-sources for replacing DFB lasers in power consumption sensitive applications, the main challenges in developing the cost and time efficient nano metrology tools for supporting processing and characterization are discussed. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject long-wavelength en_US
dc.subject vertical cavity surface-emitting lasers en_US
dc.subject VCSELs en_US
dc.subject wafer fusion en_US
dc.subject nanometrology en_US
dc.title Nano Metrology Aspects of Design, Simulation, Fabrication, Testing, Reliability and Failure Analysis of Wafer Fused VCSEL en_US
dc.type Article en_US


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