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Interferometric Method Application for Sub-micrometers Thickness Measurements of Spin-coated PEPC and PETPC Polymer Films

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dc.contributor.author MESHALKIN, A.
dc.contributor.author ANDRIES, A.
dc.contributor.author ACHIMOVA, E.
dc.contributor.author BETS, L.
dc.contributor.author ANDRIES, I.
dc.contributor.author DRAHNEA, S.
dc.date.accessioned 2019-10-24T12:55:32Z
dc.date.available 2019-10-24T12:55:32Z
dc.date.issued 2011
dc.identifier.citation MESHALKIN, A., ANDRIES, A., ACHIMOVA, E. et al. Interferometric Method Application for Sub-micrometers Thickness Measurements of Spin-coated PEPC and PETPC Polymer Films. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 194-197. ISBN 978-9975-66-239-0. en_US
dc.identifier.isbn 978-9975-66-239-0
dc.identifier.uri http://repository.utm.md/handle/5014/5230
dc.description.abstract This paper deals with the interferometric thickness measurements of spin-coated thin polymer films. Spin coating is currently the predominant technique employed to produce uniform thin films of polymers in sub-micrometer range. But the thickness measurement of such thin films requires the application of high precision methods. In the paper we design and develop the system based on the common interferometer MII-4 and digital camera for measurement of the thin PEPC and PETPC polymer films. Different concentration of polymer solution and spin speed were used in order to obtain thin films with variable thickness (from 100 nm to 1000 nm) by spin coating technique. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject thin polymer layers en_US
dc.subject spin-coating en_US
dc.subject interferometric thickness measurements en_US
dc.title Interferometric Method Application for Sub-micrometers Thickness Measurements of Spin-coated PEPC and PETPC Polymer Films en_US
dc.type Article en_US


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