Computer- assisted electron beam recording of patterns in As2S3 films

Abstract

In this paper, we present the PC-assisted e-beam recording of some diffraction structures in As2S3 thin films with thickness about 1 μm. The square surfaces occupied by holograms on the film were from 400 x 400 μm2 up to 1600 x 1600 μm2. The diffraction gratings mosaic of different configurations were recorded in the vector mode. The raster mode of recording have been used for microimages and digital holograms presented in .bmp format. Digital hologram of cube image was reconstructed by He-Ne laser beam (wavelength 0.633 μm) in transmission mode and investigated. The diffractive characteristics of the designed diffraction structures and images were studied. Some multibeams diffraction and their optical properties are experimentally studied.