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Computer- assisted electron beam recording of patterns in As2S3 films

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dc.contributor.author ABASHKIN, Vladimir
dc.contributor.author ACHIMOVA, Elena
dc.contributor.author SERGHEEV, Sergei
dc.contributor.author PRISACAR, Alecsandr
dc.date.accessioned 2019-10-25T11:19:36Z
dc.date.available 2019-10-25T11:19:36Z
dc.date.issued 2013
dc.identifier.citation ABASHKIN, Vladimir, ACHIMOVA, Elena, SERGHEEV, Sergei et al. Computer- assisted electron beam recording of patterns in As2S3 films. In: ICNBME-2013. International Conference on Nanotechnologies and Biomedical Engineering. German-Moldovan Workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the 2th intern. conf., April 18-20, 2013. Chişinău, 2013, pp. 89-92. ISBN 978-9975-62-343-8. en_US
dc.identifier.isbn 978-9975-62-343-8
dc.identifier.uri http://repository.utm.md/handle/5014/5305
dc.description.abstract In this paper, we present the PC-assisted e-beam recording of some diffraction structures in As2S3 thin films with thickness about 1 μm. The square surfaces occupied by holograms on the film were from 400 x 400 μm2 up to 1600 x 1600 μm2. The diffraction gratings mosaic of different configurations were recorded in the vector mode. The raster mode of recording have been used for microimages and digital holograms presented in .bmp format. Digital hologram of cube image was reconstructed by He-Ne laser beam (wavelength 0.633 μm) in transmission mode and investigated. The diffractive characteristics of the designed diffraction structures and images were studied. Some multibeams diffraction and their optical properties are experimentally studied. en_US
dc.language.iso en en_US
dc.publisher Tehnica UTM en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject As2S3 thin films en_US
dc.subject computer-aided recording en_US
dc.subject diffraction elements en_US
dc.subject e-beam recording en_US
dc.title Computer- assisted electron beam recording of patterns in As2S3 films en_US
dc.type Article en_US


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