Abstract:
There are a variety of applications for devices that extend into the deep-UV,
including biological agent detection and optical storage. The nitride material system is a set
of semiconducting compounds that have wavelengths that span a broad range, from yellow
to deep-UV. AlGaN has a direct bandgap that extends into the deep-UV range; the devicequality
material, is deposited epitaxially using metalorganic chemical vapor deposition on
sapphire substrates.