MEMS switch design and analysis based on electromagnetic simulator

STEFAN, Simion

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dc.contributor.author	STEFAN, Simion
dc.date.accessioned	2019-10-30T08:53:58Z
dc.date.available	2019-10-30T08:53:58Z
dc.date.issued	2005
dc.identifier.citation	STEFAN, Simion. MEMS switch design and analysis based on electromagnetic simulator. In: Microelectronics and Computer Science: proc. of the 4th intern. conf., September 15-17, 2005. Chişinău, 2005, vol. 2, pp. 360-364. ISBN 9975-66-038-X.	en_US
dc.identifier.isbn	9975-66-038-X
dc.identifier.uri	http://repository.utm.md/handle/5014/5638
dc.description.abstract	The paper presents a design procedure for a distributed switch consisting of an array of MEMSs (Micro-Electro-Mechanical-Systems) loading a CPW (CoPlanar Waveguide). The MEMS equivalent circuit is developed from the scattering parameters obtained by using an electromagnetic simulator and then this equivalent circuit is used to design the switch. The designed switch consisting of 1, 2 and 3 MEMSs are finally analyzed using again the electromagnetic simulator. The insertion losses in the all cases are smaller than 0.11 dB up to the maximum operating frequency of 35 GHz.	en_US
dc.language.iso	en	en_US
dc.publisher	Technical University of Moldova	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	MEMS	en_US
dc.subject	Micro-Electro-Mechanical-Systems	en_US
dc.subject	microwave switches	en_US
dc.subject	switches	en_US
dc.subject	electromagnetic simulations	en_US
dc.title	MEMS switch design and analysis based on electromagnetic simulator	en_US
dc.type	Article	en_US