The plasticity index of the /soft-film/soft-substrate/ coated systems

Abstract

The advanced devices from the last years contain thin films deposited on substrates of materials with different properties, thus forming coated systems (CS) of film/substrate type. Scientists, as well as engineering staff are increasingly interested in knowing the mechanical properties of CS used in micro- and nanoelectromechanical systems [1]. In this paper, we investigate CS of the type „soft-film/soft-substrate” – Cu/LiF with different thickness of films: nanometric (t1=85 nm), submicronic (t2=470 nm) and micrometric (t3=1000 nm), obtained by the magnetron sputtering method.