Fabrication of nanoperforated GaN nanomembranes

Abstract

We report on fabrication of suspended ultrathin GaN membranes nanoperforated in an ordered fashion using direct writing of negative charges by focused ion beam and subsequent photoelectrochemical etching of the GaN epilayers. Recent studies show that GaN is biocompatible and non toxic material and could be considered for biomedical implants [1]. Possessing piezoelectric and easy adaptable for wireless technology it becomes a good candidate for implantable biosensors for monitoring of biological processes. Nanostructured materials have an incredible high surface to volume ratio. The high specific surface of GaN nanostructures could affect cells behavior [2].