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Analysis of the Control Action of the Epitaxial Layers Growing in the Automatic System with PID Controller

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dc.contributor.author BARANOV, Simion
dc.contributor.author FIODOROV, Ion
dc.contributor.author COJUHARI, Irina
dc.contributor.author GLINCA, Maxim
dc.date.accessioned 2019-11-19T08:02:17Z
dc.date.available 2019-11-19T08:02:17Z
dc.date.issued 2017
dc.identifier.citation BARANOV, Simion, FIODOROV, Ion, COJUHARI, Irina et al. Analysis of the Control Action of the Epitaxial Layers Growing in the Automatic System with PID Controller [Resursă electronică]. In: SIELMEN 2017: Proceedings of the 11-th international conference on electromechanical and power systems, 11-13 octombrie, 2017. Chișinău, 2017, pp. 040-045. ISBN 978-1-5386-1846-2. en_US
dc.identifier.isbn 978-1-5386-1846-2
dc.identifier.uri http://repository.utm.md/handle/5014/7010
dc.description Abstract & References en_US
dc.description.abstract It is reported an investigation of control action (CA) of the energy source in the automatic control system of thermal process’ parameters in the technology of the epitaxial growing of the compound layers A3B5 by the reaction transport method in the quasi-rapidity conditions. These conditions superpose more rigid requirements of dynamic error over the minimum value of static error in the modern technological equipment. In the conditions of the optimal rapidity it is studied the quality of the control action, which is formed in the control device according to the control algorithm of the object, in the given case, it is investigated - the thermal object, and its correlation with the quality of the energy source of the system. en_US
dc.language.iso en en_US
dc.publisher Institute of Electrical and Electronics Engineers en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject epitaxial layers en_US
dc.subject hydride vapors en_US
dc.subject automatic control systems en_US
dc.subject control actions en_US
dc.title Analysis of the Control Action of the Epitaxial Layers Growing in the Automatic System with PID Controller en_US
dc.type Article en_US


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  • 2017
    11-13 Oct. 2017

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Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

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