Non-lithographic nanotechnologies for 2D and 3D nanofabrication

Abstract

In this paper we present a review of technological approaches for 2D and 3D nanofabrication of semiconductor compounds by using radiation treatment and electrochemistry. Novel spatial nanoarchitectures based on III-V and II-VI compounds as well as two-dimensional metallo-dielectric structures in different geometries are demonstrated. A breakthrough in the design and fabrication of ultrathin membranes of non-layered wideband-gap semiconductor compounds is presented. Possible electronic and photonic applications of the elaborated nanostructures are considered.