The analysis of Nb and Cu41Ni59 - alloy thin films by atomic force microscopy

Abstract

This work is one part of a whole project for elaboration of a superconducting spinswitch. At a certain stage there was the need to develop technologies of magnetron sputtering of mirror-smooth film structures. AFM microscope acted as feedback for controlling the quality of the surface of films and for correction of deposition regimes. The paper is a detailed review of the deposition regimes of each layer (superconducting Nb and ferromagnetic alloy Cu41Ni59), and also the basic description of the work on the AFM microscope.