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Sistem cu multe canale de reglare automată a procesului de creştere a structurilor semiconductoare prin HVPE

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dc.contributor.author BARANOV, S.
dc.contributor.author CHEIBAŞ, V.
dc.contributor.author COJUHARI, I.
dc.date.accessioned 2019-12-06T14:51:56Z
dc.date.available 2019-12-06T14:51:56Z
dc.date.issued 2012
dc.identifier.citation BARANOV, S., CHEIBAŞ, V., COJUHAR,I I. Sistem cu multe canale de reglare automată a procesului de creştere a structurilor semiconductoare prin HVPE. In: Telecommunications, Electronics and Informatics - ICTEI 2012: proc. of the 5th intern. conf., Technical University of Moldova, May 11-13, 2012. Chișinău, 2012, Vol. 1, pp. 363-366. ISBN 978-9975-45-082-9. en_US
dc.identifier.isbn 978-9975-45-082-9
dc.identifier.uri http://repository.utm.md/handle/5014/7342
dc.description.abstract The automatic control system for IEC-3/4R technological equipment of the gallium arsenide (GaAs) semiconductor structures epitaxial growing by HVPE method was elaborated. The aim of elaboration is increasing economic efficiency of the equipment and epitaxial structures quality for the high temperature ultraspeed semiconductor devices. The system was built on the universal two-channels programmable regulator TRM151 and interface converter AS4, fabricated by OVEN company. The elaboration consists in the IEC-3/4R laboratory technological equipment modernization into industrial technological equipment for microelectronic industry reanimation in Moldova. en_US
dc.language.iso ro en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject gallium arsenide semiconductors en_US
dc.subject semiconductors en_US
dc.subject sisteme automate en_US
dc.subject structuri semiconductoare en_US
dc.subject semiconductoare en_US
dc.subject epitaxie en_US
dc.title Sistem cu multe canale de reglare automată a procesului de creştere a structurilor semiconductoare prin HVPE en_US
dc.type Article en_US


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