Obținerea și caracterizarea filmelor subțiri în sistemul ZnSnO

Abstract

Quasi-planar thin films with thickness of 200 – 700 nm and surface roughness around 10 nm have been prepared by aerosol spray deposition in the ZnSnO semiconductor system. Heterostructures have been produced by deposition of films on p-Si substrates and their operation as injection photodiodes has been demonstrated.