DSpace Repository
Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме
Login
DSpace Home
→
Facultatea Electronică şi Telecomunicaţii
→
Conferinţa Internaţională "Telecomunicaţii, Electronică şi Informatică" - ICTEI
→
2018
→
View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме
СЕНОКОСОВ, Э. А.
;
ЖДАНОВ, А. А.
;
ЧУКИТА, В. И.
URI:
http://repository.utm.md/handle/5014/8110
Date:
2018
Abstract:
A device has been developed that allows to automatically control the technological process of growing semiconductor layers and to obtain layers with controlled physical parameters.
Show full item record
Files in this item
Name:
ICTEI_2018_p501_5 ...
Size:
1.163Mb
Format:
PDF
View/
Open
The following license files are associated with this item:
Creative Commons
This item appears in the following Collection(s)
2018
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States
Search DSpace
Search DSpace
This Collection
Advanced Search
Browse
All of DSpace
Communities & Collections
By Issue Date
Authors
Titles
Subjects
This Collection
By Issue Date
Authors
Titles
Subjects
My Account
Login
Register