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Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме
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| dc.contributor.author | СЕНОКОСОВ, Э. А. | |
| dc.contributor.author | ЖДАНОВ, А. А. | |
| dc.contributor.author | ЧУКИТА, В. И. | |
| dc.date.accessioned | 2020-05-07T07:36:42Z | |
| dc.date.available | 2020-05-07T07:36:42Z | |
| dc.date.issued | 2018 | |
| dc.identifier.citation | СЕНОКОСОВ, Э. А., ЖДАНОВ, А. А., ЧУКИТА, В. И. Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме. In: Telecomunicaţii, Electronică şi Informatică: proc. of the 6th intern. conf., May 24-27, 2018. Chişinău, 2018, pp. 501-502. ISBN 978-9975-45-540-4. | en_US |
| dc.identifier.isbn | 978-9975-45-540-4 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/8110 | |
| dc.description.abstract | A device has been developed that allows to automatically control the technological process of growing semiconductor layers and to obtain layers with controlled physical parameters. | en_US |
| dc.language.iso | ru | en_US |
| dc.publisher | Tehnica UTM | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | semiconductor layers | en_US |
| dc.subject | obtain layers | en_US |
| dc.title | Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме | en_US |
| dc.type | Article | en_US |
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