Influence of Fe catalyst Morphology on the Growing of Carbon Nanotubes

Abstract

This study investigates the influence of Fe catalysts on the growing of carbon nanotubes (CNTs) by chemical vapour deposition (CVD) method on different types of substrates. The catalyst film was deposited on the silicon, ceramic or metallic substrates by magnetron sputtering before CNTs growing using C2H4 as carbon source. A detailed study about the influence of catalyst layer thickness and morphology and CVD process temperature on the growth of CNTs was performed, using different microscopy techniques.